MEMS Module

MEMS devices involve the full range of physical effects from electrostatics, to heat transfer, to mechanical stresses and strains, to microfluidics, and more. COMSOL Multiphysics' approach makes it easier to model such phenomena in both coupled and uncoupled ways. This minicourse guides you through examples involving a variety of coupled effects and modeling techniques.

The exersices of this course include:

• Microresistor Beam model combines the effects of electromagnetics, ohmic heat loss, heat dissipation, thermal expansion, and structural deformation, and shows how to proceed with sequential of fully coupled analysis.
• Piezoelectric shear Actuated Beam model shows how to model piezoelectric actuators using static, eigenmode, and frequency response analyses, and how to assing damping to the model.
• Low-Voltage Electroosmotic Micropump model show how to model low Reynolds number flows with coupled electrokinetic effects.